Wafer Cleaning - AxusTech

The Process Development Lab & Foundry Services team is composed of a prestigious group of process and tool engineers along with wafer metrology experts. We help clients identify their chemical mechanical polishing (CMP) needs and work with them to custom design and develop the CMP process and advanced wafer solutions that fit their needs to build the device of the future.

Our wafer processing services include expertise in post CMP wafer cleaning. We understand that one of the primary requirements of IC manufacturing is the quest to eliminate those surface defects that have significant impacts on fab yields. With advancement in wafer cleaning equipment provided by our new and innovative Aquarius™ Wafer Cleaner, improvements in all aspects of 100mm, 150mm, and 200mm wafer cleaning including defectivity and throughput are now even more accessible with the right solution to complete your CMP process.

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