Aquarius A200-sa

The new and innovative Axus Technology Aquarius Wafer Cleaner provides improvements in all aspects of 100mm, 150mm, and 200mm wafer cleaning, including defectivity and throughput.

STANDARD FEATURES INCLUDE:

Four brush boxes with full recipe control of all critical process variables
Two spin-rinse-dry stations
Two wet cassette stations in and two dry stations out
High speed wafer handling robot with dual end effectors
All operations can be done manually from the graphical user interface
Three different modes of control for brush/wafer contact: position, brush torque, and contact force