Aquarius A200-sa

The new and innovative Axus Technology Aquarius Wafer Cleaner provides improvements in all aspects of 100mm, 150mm, and 200mm wafer cleaning, including defectivity and throughput.

STANDARD FEATURES INCLUDE:

  • Four brush boxes with full recipe control of all critical process variables
  • Two spin-rinse-dry stations
  • Two wet cassette stations in and two dry stations out
  • High speed wafer handling robot with dual end effectors
  • All operations can be done manually from the graphical user interface
  • Three different modes of control for brush/wafer contact: position, brush torque, and contact force

OPTIONAL FEATURES:

  • On-board dilution capabilities
  • Flat Finder/OCR

Dimensions: 70″W x 56″D x 98″H

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