The new and innovative Axus Technology Aquarius Wafer Cleaner provides improvements in all aspects of 100mm, 150mm, and 200mm wafer cleaning, including defectivity and throughput.
STANDARD FEATURES INCLUDE:
- Four brush boxes with full recipe control of all critical process variables
- Two spin-rinse-dry stations
- Two wet cassette stations in and two dry stations out
- High speed wafer handling robot with dual end effectors
- All operations can be done manually from the graphical user interface
- Three different modes of control for brush/wafer contact: position, brush torque, and contact force
- On-board dilution capabilities
- Flat Finder/OCR
Dimensions: 70″W x 56″D x 98″H
Process Request Form
Parts & ServiceS
NEWS & EVENTS
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