Wafer Grinders
Axus offers refurbished Strasbaugh and Disco Wafer Grinders to bring them back to like-new condition.
Wafer/Substrate Cleaning
Axus offers New and Refurbished cleaning equipment to add and improve capabilities.
CMP
Axus is a worldwide seller and distributer of new, remanufactured and refurbished CMP tools and tool upgrades.
Inspection Systems
Surface defects are detected and measured
Slurry Delivery System
Axus has developed a full line of revolutionary Slurry Delivery Systems to get the capabilities of larger slurry systems in a smaller system
CMP, Polishing, Grinding and Cleaning Equipment Experts
Axus Technology offers new, used, refurbished and remanufactured process equipment. Our experienced engineering team excels in the design and delivery of specialized process tool upgrades and improvements to enhance performance such as reliability, throughput, and technical process related advancements. The Axus team can help you maximize the productivity of your existing tools, custom-configure legacy process equipment or engineer, develop, and install our own new, specialty equipment to meet your exact need.