NEW EQUIPMENT New Process Equipment REFURBISHED Refurbished Process Equipment refurbished CMP tools REMANUFACTURED Remanufactured Process Equipment AXUS CARRIER UPGRADES

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Wafer Grinders

Axus offers refurbished Strasbaugh and Disco Wafer Grinders to bring them back to like-new condition.

wafer grinders Wafer cleaners

Wafer/Substrate Cleaning

Axus offers New and Refurbished cleaning equipment to add and improve capabilities.

CMP

Axus is a worldwide seller and distributer of new, remanufactured and refurbished CMP tools and tool upgrades.

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Inspection Systems

Surface defects are detected and measured

inspection equipment

Slurry Delivery System

Axus has developed a full line of revolutionary Slurry Delivery Systems to get the capabilities of larger slurry systems in a smaller system

Slurry blend distribution system

CMP, Polishing, Grinding and Cleaning Equipment Experts

Axus Technology offers new, used, refurbished and remanufactured process equipment.  Our experienced engineering team excels in the design and delivery of specialized process tool upgrades and improvements to enhance performance such as reliability, throughput, and technical process related advancements. The Axus team can help you maximize the productivity of your existing tools, custom-configure legacy process equipment or engineer, develop, and install our own new, specialty equipment to meet your exact need.

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Process Request Form

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Parts & ServiceS

NEWS & EVENTS

POSTED ON Wednesday November 4, 2020

Axus Technology partners with top industry research leaders on the production of an innovative single-chip device for the PNT market.

Chandler, Arizona, USA, – Axus Technology (Axus), a leading global provider of CMP, wafer thinning and wafer surface processing solutions for semiconductor applications, is excited to be partnering with GE Research, GE Aviation Systems, and InertiaWave, Inc. on the production of an innovative single-chip device. SEMI, through their MEMS & Sensors Industry Group (MSIG) and FlexTech Group has provided a......Read More...

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