Ontrak DSS200 Series 2
OnTrak DSS 200 Series 2 double-sided PVA scrubber offers production-proven cleaning results for removing slurry particles. Depending on the application, throughputs of 45-65 wafers per hour are attainable, making the DSS-200 Series 2 the most cost-effective wafer cleaning system for wafers from 100mm to 200mm.
The DSS-200 Series 2 can accommodate a wide range of cleaning process applications such as:
- Post-CMP cleaning: oxide, polysilicon, nitride, tungsten, aluminum and copper
- General purpose cleaning: Pre and Post-CVD oxides, postmetallization, surface topography, trench
- Silicon cleaning: prime silicon, reclaim silicon, fab monitor reclaim
STANDARD FEATURES INCLUDE:
- 200mm ergonomic load station
- Double sided PVA scrub
- Dual brush boxes
- Dark plastic covers protect light sensitive wafers
- Ammonia dispense
- IR assisted spin dry station
- Robotic unload
- Vertical unload station
- Touchscreen controls
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NEWS AND EVENTS
Axus Partners with CP Display to Accelerate Monolithic 1080p MicroLED Displays to Mainstream AR
Axus partners with Compound Photonics US Corporation to accelerate sub 5 µm pixel microLED development to the mass market.
Axus and CP are partnering to integrate critical wafer-scale processes needed for mass-production scale up of CP’s 3 µm pixel, 0.26” diagonal, 1080p microLED displays for the next generation AR glasses. Specifically, Axus will deploy its state-of-the-art Capstone CMP system with integrated post-CMP clean to enable wafer planarization and surface preparation process solutions for successful wafer-scale bonding of microLED wafers to high-performance CMOS backplanes.
Axus/Plessey Partnership
Axus partners with Plessey Semiconductors to help bring high-performance GaN-on-Silicon monolithic microLED technology to the mass market.
Using tooling from Axus and optimised processes, Plessey Semiconductors has achieved a successful wafer to wafer bond of a 1080p microLED display 0.26” diagonal to a 3-micron pixel-pitch backplane. Much smaller than the 0.7" diagonal 8-micron pixel-pitch active-matrix display previously demonstrated.
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