About Axus Technology

At Axus Technology, we are dedicated to revolutionizing the world of Chemical Mechanical Planarization (CMP) with cutting-edge equipment and custom process development services. As a global Original Equipment Manufacturer (OEM), we pride ourselves on delivering innovative solutions that enable our clients to bring their products to market faster, more efficiently, and with uncompromising quality.

 

Our Commitment to Excellence

With a focus on modern, flexible CMP equipment and custom process development, Axus Technology is committed to exceeding industry standards and client expectations. Our engineering team is at the forefront of specialized process tool updates, enhancing reliability, throughput, and technical advancements. We are passionate about empowering our clients to maximize the efficiency of their existing CMP tools, custom configure legacy process equipment, or engineer, develop, and install new equipment to meet their unique requirements.

 

Next-Generation Technology

At the core of our offerings are next-generation CMP processing and cleaning tools, including the acclaimed Capstone® C200 series and Aquarius™ Wafer Cleaner. These state-of-the-art solutions are designed to meet the evolving needs of various technology sectors, including 5G, sensors, semiconductors, advanced packaging, MEMS, LED, and nanotechnology. With a focus on precision, reliability, and performance, our equipment and process solutions have been recognized as industry-leading, enabling our clients to stay ahead in a rapidly evolving market. We understand that one size does not fit all, especially in the world of CMP. That’s why we offer custom process development services, working closely with our clients to design and develop CMP processes tailored to their specific needs. Our expertise spans a wide range of materials and applications, including III-V and II-VI materials, TSV, precision optical, photonics, and more. We are dedicated to helping our clients build the devices of the future by providing advanced wafer solutions that precisely meet their requirements

 

Vision for the Future

At Axus Technology, we are not content with the status quo. We continually strive to push the boundaries of what’s possible in CMP, wafer thinning, and wafer cleaning applications. Our recent funding of $12.5 million is a testament to our commitment to further our mission of designing and building modern, flexible next-generation equipment and providing custom process development services. We envision a future where companies of all sizes, from startups to high-volume manufacturers, can test, develop, and implement solutions for novel and emerging materials, process integration schemes, products, and applications. If you’re ready to explore the next frontier of CMP equipment and process development, we invite you to get in touch with our team at Axus Technology. Together, we can elevate your capabilities, accelerate your time to market, and unlock new possibilities for your products and applications.

The Team

Dan Trojan

President/CEO

Dennis Webster

GM, VP

Jim Kelly

Vice President of Sales

John Shugrue

Director of Engineering

Catherine Bullock

Director of Process Technology

New CMP Equipment Request Form

Development Lab Process Request Form

Software Request Form

Parts & Services Request Form