Parts & Services - AxusTech

Field Support, Spare Parts and Upgrades

Axus Technology has risen to be a recognized worldwide provider of exceptional Customer Service when it comes to Field Support and Spare Parts for the legacy processing tools used for the CMP process, Precision Wafer Thinning, and Post-Process wafer cleaning tools. Our depth of knowledge of these processing tools including their functionality, their process capability, and the reliability expectations is unmatched.


Contact for


Development Lab

Process Request Form

Request for

Parts & ServiceS