OUTSTANDING CUSTOMER SERVICE FIELD SUPPORT SPARE PARTS UPGRADES

Slide Post CMP Pad Conditioning Axus Technology provides repair and remanufacture services for pad conditioning arms for Applied Materials 200mm and 300mm CMP tools. CMP pad conditioning service robot repair

Precision Robot Repair

Axus offer repair and refurbishment services for a wide variety of common industry robots.

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Control System Parts

Axus Technology has responsibility for all OEM and end user support, including all sales and service activities, for a range of precision positioning products made by Moog, Gespac and Berkeley.

Moog control systems
Platen restoration services

Platen Restoration Program

Axus Technology's Platen Restoration Program returns platens to OEM specified flatness and surface finish.

Field Support, Spare Parts and Upgrades

Axus Technology has risen to be a recognized worldwide provider of exceptional Customer Service when it comes to Field Support and Spare Parts for the legacy processing tools used for the CMP process, Precision Wafer Thinning, and Post-Process wafer cleaning tools. Our depth of knowledge of these processing tools including their functionality, their process capability, and the reliability expectations is unmatched.

Contact for

Equipment

Development Lab

Process Request Form

Request for

Parts & ServiceS

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