Parts & Services - AxusTech

Field Support, Spare Parts, and Tool Upgrades

Axus Technology has risen to be a recognized worldwide provider of exceptional Customer Service when it comes to Field Support and Spare Parts for legacy processing tools including the CMP parts associated with CMP Polishing, Precision Wafer Thinning, and Post-Process Wafer Cleaning. Our depth of knowledge of these processing tools including their functionality, their process capability, and the reliability expectations is unmatched. Contact us today for world-class semiconductor support services.


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