OUTSTANDING CUSTOMER SERVICE FIELD SUPPORT SPARE PARTS UPGRADES

Slide Post CMP Pad Conditioning Axus Technology provides repair and remanufacture services for pad conditioning arms for Applied Materials 200mm and 300mm CMP tools. CMP pad conditioning service robot repair

Precision Robot Repair

Axus offer repair and refurbishment services for a wide variety of common industry robots.

Slide

Control System Parts

Axus Technology has responsibility for all OEM and end user support, including all sales and service activities, for a range of precision positioning products made by Moog, Gespac and Berkeley.

Moog control systems Platen restoration services

Platen Restoration Program

Axus Technology's Platen Restoration Program returns platens to OEM specified flatness and surface finish.

Field Support, Spare Parts and Upgrades

Axus Technology has risen to be a recognized worldwide provider of exceptional Customer Service when it comes to Field Support and Spare Parts for the legacy processing tools used for the CMP process, Precision Wafer Thinning, and Post-Process wafer cleaning tools. Our depth of knowledge of these processing tools including their functionality, their process capability, and the reliability expectations is unmatched.

Contact for

Equipment

Development Lab

Process Request Form

Request for

Parts & ServiceS

NEWS & EVENTS

POSTED ON Wednesday November 4, 2020

Axus Technology partners with top industry research leaders on the production of an innovative single-chip device for the PNT market.

Chandler, Arizona, USA, – Axus Technology (Axus), a leading global provider of CMP, wafer thinning and wafer surface processing solutions for semiconductor applications, is excited to be partnering with GE Research, GE Aviation Systems, and InertiaWave, Inc. on the production of an innovative single-chip device. SEMI, through their MEMS & Sensors Industry Group (MSIG) and FlexTech Group has provided a......Read More...

DOCUMENT LIBRARY    |    CAREER    |    NEWS    |    CONTACT
© 2020 AXUS TECHNOLOGY. ALL RIGHTS RESERVED
7001 W. Erie St. Suite 1, Chandler, AZ 85226
(480) 705-8000