OUTSTANDING CUSTOMER SERVICE FIELD SUPPORT SPARE PARTS UPGRADES

Slide Post CMP Pad Conditioning Axus Technology provides repair and remanufacture services for pad conditioning arms for Applied Materials 200mm and 300mm CMP tools. CMP pad conditioning service robot repair

Precision Robot Repair

Axus offer repair and refurbishment services for a wide variety of common industry robots.

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Control System Parts

Axus Technology has responsibility for all OEM and end user support, including all sales and service activities, for a range of precision positioning products made by Moog, Gespac and Berkeley.

Moog control systems Platen restoration services

Platen Restoration Program

Axus Technology's Platen Restoration Program returns platens to OEM specified flatness and surface finish.

Field Support, Spare Parts and Upgrades

Axus Technology has risen to be a recognized worldwide provider of exceptional Customer Service when it comes to Field Support and Spare Parts for the legacy processing tools used for the CMP process, Precision Wafer Thinning, and Post-Process wafer cleaning tools. Our depth of knowledge of these processing tools including their functionality, their process capability, and the reliability expectations is unmatched.

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NEWS & EVENTS

POSTED ON Tuesday May 4, 2021

Axus Technology Announces Industry-Leading Performance and Capabilities for Advanced Single-Wafer Silicon Carbide CMP

Chandler, Arizona, USA, May 4th, 2021 - Axus Technology (Axus), a leading global provider of CMP, wafer thinning and wafer surface processing solutions for semiconductor applications, has been working diligently to develop and improve leading-edge CMP process performance and hardware capability for advanced single-wafer silicon carbide (SiC) CMP applications. The primary focus of these efforts include: 1) thin/fragile wafer handling......Read More...

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