






Precision Robot/Pre-Aligner Repair
Axus offer repair and refurbishment services for a wide variety of common industry robots.

Control System Parts
Axus Technology has responsibility for all OEM and end user support, including all sales and service activities, for a range of precision positioning products made by Moog, Gespac and Berkeley.


Platen Restoration Program
Axus Technology's Platen Restoration Program returns platens to OEM specified flatness and surface finish.
Field Support, Spare Parts and Upgrades
Axus Technology has risen to be a recognized worldwide provider of exceptional Customer Service when it comes to Field Support and Spare Parts for the legacy processing tools used for the CMP process, Precision Wafer Thinning, and Post-Process wafer cleaning tools. Our depth of knowledge of these processing tools including their functionality, their process capability, and the reliability expectations is unmatched.