Ultra-thin wafer handling to 100μm and less Disco DFG8540 Disco DFG8540 fully automatic in-feed surface grinder Disco DFG8540 Disco DFG8540 grinder Disco DFG8540 Disco DFG8540 surface grinder Disco DFG8540

Disco DFG8540

Disco DFG8540 fully automatic in-feed surface grinder
Disco DFG8540 fully automatic in-feed surface grinder Disco DFG8540 wafer grinder Disco DFG8540 fully automatic in-feed surface grinder

Disco DFG8540 system is a fully automatic in-feed surface grinder. With its conventional two-spindle, three-chuck design, the DFG8540 is capable of performing both large diameter grinding and thin-finish grinding. The processing position of the grinding wheel coincides with the chuck table for each spindle for improved grinding performance.

STANDARD FEATURES INCLUDE:

  • Automated thinning up to 200mm diameter wafers
  • Ultra-thin wafer handling to 100μm and less
  • DBG option available and plasma-ready
  • Flat/Notch alignment orientation
  • Interior grind water nozzle
  • Chuck/Spinner table
  • Positioning and stopping system
  • 2 air bearing grind spindles, 3 rotary-chuck tables

OPTIONAL FEATURES:

  • Vacuum system with automatic fluid separation unit
  • Temperature control system for stabilizing process results
  • Filtration system

DATASHEETS

Contact for

Equipment

Development Lab

Process Request Form

Contact for

Parts & ServiceS

NEWS AND EVENTS

 

Axus/Plessey Partnership

Axus partners with Plessey Semiconductors to help bring high-performance GaN-on-Silicon monolithic microLED technology to the mass market.

Using tooling from Axus and optimised processes, Plessey Semiconductors has achieved a successful wafer to wafer bond of a 1080p microLED display 0.26” diagonal to a 3-micron pixel-pitch backplane. Much smaller than the 0.7" diagonal 8-micron pixel-pitch active-matrix display previously demonstrated.

READ MORE

 

Visit Us At

Axus will be exhibiting at Semicon West 2020 in San Francisco, CA July 21-23, 2020

READ MORE

 

DOCUMENT LIBRARY    |    CONTACT
© 2020 AXUS TECHNOLOGY. ALL RIGHTS RESERVED
7001 W. Erie St. Suite 1, Chandler, AZ 85226
(480) 705-8000