CMP Equipment

Axus Technology is a global OEM company with next-generation CMP processing and cleaning tools such as the Capstone® C200 series and Aquarius™ Wafer Cleaner. We’re also a worldwide seller and distributer of remanufactured CMP tools such as Applied Material’s Mirra and Mirra Mesa, IPEC, Speedfam and Strasbaugh CMP systems. Tool upgrades, parts, and maintenance services round out our world-class customer support.