CMP - AxusTech

CMP Equipment

Axus Technology is a global OEM company with next-generation CMP processing and cleaning tools such as the Capstone® C200 series and Aquarius™ Wafer Cleaner. We’re also a worldwide seller and distributer of remanufactured CMP tools such as Applied Material’s Mirra and Mirra Mesa, IPEC, Speedfam and Strasbaugh CMP systems, and new G&P Technology CMP tools. Tool upgrades, parts, and maintenance services round out our world-class customer support.

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Equipment

Development Lab

Process Request Form

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Parts & ServiceS