Strasbaugh 6EC

The Strasbaugh 6EC CMP System is an economical tool for CMP research, failure analysis, and low-volume production. Its semi-automatic operations are programmable through a color, touch-screen GUI for repeatable and accurate process control. The Model 6EC is the affordable solution, providing the benefits of state-of-the-art CMP at low cost.

STANDARD FEATURES INCLUDE:

Closed-loop table and spindle drives help ensure consistent process results
Programmable pad conditioning increases the lifetime of the pad and improves the lifetime of the pad and improves WIWNU
Minimal maintenance lowers the cost of ownership
Small footprint offers convenience for small labs
Pad conditioning system provides in-situ and/or ex-situ programmable selective pad conditioning for consistent removal rates and minimum non-uniformity. 20 zones of programmable control: dwell time, down force and RPM can be programmed for each zone. Pad conditioning can be done with a diamond plated disk or nylon brush