ONTRAK DSS200 Series 1 OnTrak DSS 200 Series 1 double-sided PVA scrubber ONTRAK DSS200 Series 1 OnTrak DSS 200 Series 2 wafer cleaning system ONTRAK DSS200 Series 1 OnTrak DSS 200 Series 1 double-sided PVA scrubber ONTRAK DSS200 Series 1

ONTRAK DSS200 Series 1

OnTrak DSS 200 Series 1 Post CMP cleaning system
OnTrak DSS 200 Series 1 Post CMP cleaning system OnTrak DSS 200 Series 1 double-sided PVA scrubber OnTrak DSS 200 DSS-200 Series 1 cost-effective cleaning system

OnTrak DSS 200 Series 1 double-sided PVA scrubber is designed to clean 100mm to 200mm wafers. It provides consistent, ultra-clean processing for a wide variety of applications.

The DSS-200 Series 1 is a proven, cost-effective cleaning system for the following applications:

  • Post-CMP Cleaning: oxide, polysilicon, nitride, tungsten, aluminum and copper
  • General purpose cleaning: post-CVD oxides, post-metallization, surface topography cleaning, trench cleaning
  • Silicon cleaning: prime silicon, reclaim silicon, fab monitor reclaim

STANDARD FEATURES INCLUDE:

  • Universal load station • Double sided PVA scrub
  • Dual brush boxes
  • Ammoniadispense
  • IR assisted spin dry station
  • Robotic unload
  • Vertical unload station
  • Touchscreen controls

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