OnTrak DSS 200 Series 1 double-sided PVA scrubber ONTRAK DSS200 Series 1 OnTrak DSS 200 Series 2 wafer cleaning system ONTRAK DSS200 Series 1 OnTrak DSS 200 Series 1 double-sided PVA scrubber ONTRAK DSS200 Series 1

ONTRAK DSS200 Series 1

OnTrak DSS 200 Series 1 Post CMP cleaning system
OnTrak DSS 200 Series 1 Post CMP cleaning system OnTrak DSS 200 Series 1 double-sided PVA scrubber OnTrak DSS 200 DSS-200 Series 1 cost-effective cleaning system

OnTrak DSS 200 Series 1 double-sided PVA scrubber is designed to clean 100mm to 200mm wafers. It provides consistent, ultra-clean processing for a wide variety of applications.

The DSS-200 Series 1 is a proven, cost-effective cleaning system for the following applications:

  • Post-CMP Cleaning: oxide, polysilicon, nitride, tungsten, aluminum and copper
  • General purpose cleaning: post-CVD oxides, post-metallization, surface topography cleaning, trench cleaning
  • Silicon cleaning: prime silicon, reclaim silicon, fab monitor reclaim

STANDARD FEATURES INCLUDE:

  • Universal load station • Double sided PVA scrub
  • Dual brush boxes
  • Ammoniadispense
  • IR assisted spin dry station
  • Robotic unload
  • Vertical unload station
  • Touchscreen controls

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NEWS AND EVENTS

 

Axus/Plessey Partnership

Axus partners with Plessey Semiconductors to help bring high-performance GaN-on-Silicon monolithic microLED technology to the mass market.

Using tooling from Axus and optimised processes, Plessey Semiconductors has achieved a successful wafer to wafer bond of a 1080p microLED display 0.26” diagonal to a 3-micron pixel-pitch backplane. Much smaller than the 0.7" diagonal 8-micron pixel-pitch active-matrix display previously demonstrated.

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Visit Us At

Axus will be exhibiting at Semicon West 2020 in San Francisco, CA July 21-23, 2020

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