ONTRAK DSS200 Series 1

OnTrak DSS 200 Series 1 double-sided PVA scrubber is designed to clean 100mm to 200mm wafers. It provides consistent, ultra-clean processing for a wide variety of applications.

The DSS-200 Series 1 is a proven, cost-effective cleaning system for the following applications:

  • Post-CMP Cleaning: oxide, polysilicon, nitride, tungsten, aluminum and copper
  • General purpose cleaning: post-CVD oxides, post-metallization, surface topography cleaning, trench cleaning
  • Silicon cleaning: prime silicon, reclaim silicon, fab monitor reclaim

STANDARD FEATURES INCLUDE:

  • Universal load station • Double sided PVA scrub
  • Dual brush boxes
  • Ammoniadispense
  • IR assisted spin dry station
  • Robotic unload
  • Vertical unload station
  • Touchscreen controls

DATASHEETS

ARE YOU READY?

CONTACT US

UPCOMING EVENTS

 

Visit Us At

Axus will be exhibiting at IWLPC 2019 in San Jose, CA, Oct 22-24, 2019, Booth #18.

READ MORE

 

Visit Us At

Axus will be exhibiting at IMAPS Device Packaging Conference 2020 in Fountain Hills, AZ, March 3-4, 2020

READ MORE

 

Visit Us At

Axus will be exhibiting at Semicon West 2020 in San Francisco, CA July 21-23, 2020

READ MORE

 

DOCUMENT LIBRARY    |    CONTACT
© 2019 AXUS TECHNOLOGY. ALL RIGHTS RESERVED
7001 W. Erie St. Suite 1, Chandler, AZ 85226 
(480) 705-8000