PS CMP - AxusTech

WESTECH/IPEC
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SPEEDFAM/IPEC
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STRASBAUGH/ REVASUM
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APPLIED MATERIALS
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Axus Technology’s Part and Service Department offers a variety of services and upgrades to keep your CMP wafer polishers running efficiently. Our industry experts service several polisher brands found in small to large fabs, R&D laboratories, and university research centers including Westech/IPEC, SpeedFam/IPEC, Strasbaugh/Revasum, Applied Materials, and G&P tools. We offer equipment services ranging from field service support, robot repair, platen restoration, cmp pad conditioning arm service, computer repair, elevator & 2nd table restoration, to bam repair, edge grip wand, nsk motor/controller repair, hclu restoration, usa amp repair, and spare parts. Enhancements such as a fragile wafer upgrade, pad conditioner upgrades, and wafer carrier upgrades are available towards achieving your CMP polisher restoration and performance needs.

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