STRASBAUGH / REVASUM
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Axus Technology’s Part and Service Department offers a variety of services to keep your wafer grinding process running efficiently. Our industry experts service several grinder brands found in small to large fabs including Strasbaugh/Revasum and Disco tools. We offer equipment services ranging from field service support to robot repair and spare parts.

New CMP Equipment Request Form

Development Lab Process Request Form

Software Request Form

Parts & Services Request Form