PS Clean - AxusTech

Axus Technology’s Part and Service Department offers a variety of services and upgrades to keep your wafer cleaning process running efficiently. Our industry experts service several cleaner brands found in small to large fabs, R&D laboratories, and university research centers including our new Aquarius A200-sa cleaner, Ontrak, and SAAB (standalone brush box) tools. We offer equipment services ranging from field service support to spare parts. Enhancements such as a solid drive upgrade, fragile wafer upgrade, series 0 & 1 touch upgrade, and clear wafer upgrades are available for Ontrak tools.

Contact for


Development Lab

Process Request Form

Software Request


Request for

Parts & ServiceS