Axus Technology is a global OEM company that offers modern, flexible CMP processing and cleaning tools such as the Capstone® C200 series and Aquarius™ Wafer Cleaner. We also offer used, refurbished, and remanufactured equipment in addition to tool upgrades, parts, and maintenance services to round out our world-class customer support.

The Axus team can help you maximize the efficiency of your existing CMP tool, custom configure legacy process equipment, or engineer, develop and install new equipment that will help bring your products to market faster.

Our engineering team excels in design and delivery of specialized process tool updates to enhance reliability, throughput, and technical process related advancements.