Axus Technology offers exceptional worldwide Customer Service, Field Support, and Spare Parts for legacy CMP processing tools used in Polishing, Precision Wafer Thinning, and Post-Process Wafer Cleaning. Our team has in-depth knowledge of tool functionality, process capability, and reliability. Contact us today for world-class semiconductor support services.
CMP
WESTECH / IPEC
- Platen Restoration Program
(Learn More) - Carrier Upgrades
(Learn More) - Axus Crystal Loader
(PDF)
SPEEDFAM / IPEC / HP
- Computer Repair
- Edge Grip Wand
- Speedfam Augen
- Bam Repair
- USA Amp Repair
STRASBAUGH / REVASUM
- Crystal Carrier Upgrades
- Computer Repair
- Elevator and Second Table Restoration Program
APPLIED MATERIALS / MIRRA
- Crystal Carrier Upgrade
(Learn More) - Platen Restoration Program
(Learn More) - Nsk Motor Controller Repair
- CMP Pad Conditioning Arm Service
(Learn More) - HCLU Restoration Program
CLEAN
AXUS
- Axus Aquarius
- Axus Saab
REFLEXION LK
- CMP Pad Conditioning Arm Service
- Platen Restoration Program
ONTRAK
- Solid Drive Upgrade
- Fragile Wafer Upgrade
- Clear Wafer Upgrade
- Series 0 and 1 True Touch Upgrade
GRIND
Strausbaugh Revasum
- Strausbaugh Revasum
- 7aa
- 7ab
- 7af
DISCO
- DAG810
- DFG830
- DFG840
- DFG8540
CARRIER REBUILD REFURBISHMENT
CONTROL SYSTEMS
