Platen Restoration Program 

Axus Technology’s Platen Restoration Program returns platens to OEM specified flatness and surface finish while significantly reducing the force required for pad removal. The improved Teflon coating provides a durable and chemistry resistant surface that eases the pad removal task. User measurements showed a reduction from 40 pounds to 9 pounds of pull force required to remove a typical pad.

Platens can be returned to Axus Technology for restoration either individually or in sets. Axus Engineers inspect each platen before processing to identify any repairs that might also be required. In the event repairs are needed, the scope of work will be quoted as an additional item. All platens get reinspected prior to being recertified and returned to the end user.

Typical repairs have included repairing gouges or deep scratches in the platen surface as well as restoring other incidental platen damage. These platens are also stripped of any coating and lapped flat with an improved surface finish applied after.

We offer platen restoration services for Mirra 3400 CMP Tools, IPEC 472, IPEC 372M, Strasbaugh 6EC, Strasbaugh 6DSSP, and SpeedFam Auriga. In the event a platen cannot be properly repaired, Axus Technology can provide a new platen replacement.

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