Temperature Control Slurry Delivery System

Temp Control Slurry
Temp Control Slurry Slurry Delivery System

The Axus Technology custom-designed Temperature Control Slurry Delivery System is composed of a 30-gallon (113-liter) polyethylene plastic reservoir tank that supports the use of either high or low pH slurries. The stainless-steel propeller-style mixer is designed to keep the slurry particles in suspension. A temperature control system is an integral component of this unit. Built with locking casters on a rigid platform, this portable system is easy to move from the polisher to the day tank or other location within your fab, when not connected to the drain.

STANDARD FEATURES INCLUDE:

  • Special design to keep slurry particles in suspension
  • Automatic slurry replenishment with low-level and high-level sensors
  • Designed to maintain slurry at user selectable temperature range from 55o to 120o F (13o-49o C)

DATASHEETS

New CMP Equipment Request Form

Development Lab Process Request Form

Software Request Form

Parts & Services Request Form