Chandler, Arizona, USA, November 4th, 2020 – Axus Technology (Axus), a leading global provider of CMP, wafer thinning and wafer surface processing solutions for semiconductor applications, is excited to be partnering with GE Research, GE Aviation Systems, and InertiaWave, Inc. on the production of an innovative single-chip device. SEMI, through their MEMS & Sensors Industry Group (MSIG) and FlexTech Group has provided a great opportunity and platform to tackle PNT’s (Positioning, Navigation, and Timing) challenges with innovative solutions for GPS-denied environments. Axus’ leading-edge CMP systems are contributing to the research by helping overcome the technology-limiting issues with traditional CMP steps through utilizing the Axus CapstoneTM CMP system, Avalon Carriers, and Optical Endpoint system in improving polish performance on advanced PNT device designs and materials.
Special recognition goes to GE Global Research on being awarded for their topic of Low SWAP-C MEMS Gyrocompass Enabled by Electrostatic Carouseling Gyroscope (FT19-20-P194), as a part of SEMI’s PNT Project and government-funded program.
“This is yet another great example of the interesting, leading-edge process and technology development happening every day at Axus Technology. Much of this is enabled by our state-of-the-art CapstoneTM CMP System, along with the best-equipped CMP process development foundry in the industry that’s supported by the most experienced and skilled process and equipment engineering teams,” commented Dan Trojan, President and CEO of Axus.
About Axus Technology
Axus Technology is a recognized industry leader for equipment and process solutions for CMP, wafer thinning and wafer cleaning applications. Axus enables companies of all sizes from startups to high volume manufacturers to test, develop and implement leading-edge solutions, particularly for novel and emerging materials, process integration schemes, products and applications. Equipment solutions include low cost-of-ownership entry-level tools to state-of-the-art high-volume manufacturing systems. Process testing, development, optimization and scaling are supported by our process applications lab and foundry, which includes a full array of process equipment and supporting metrology, staffed by the most experienced team in the industry. For more information please visit www.axustech.com.
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Jim Kelly, Vice President of Sales and Marketing| JKelly@axustech.com