Dynamic Slurry Blend Carts

Axus Technology’s Dynamic Slurry Blend Carts are an inexpensive way to handle your slurries in your fab without creating a mess trying to move around 5 or 15 gallon buckets of open slurries. The carts are made to be mobile so slurries can be mixed and wheeled into the fab rather than mixing slurry in the fab. The Dynamic Series comes with several options that are listed below.

STANDARD FEATURES INCLUDE:

  • Electrical & Plumbing connections to CMP tool
  • Caster-mounted platform
  • pH resistant reservoir tank
  • Levitronix pump with controller
  • N2 Environment 

OPTIONAL FEATURES INCLUDE:

  • Tank Size- 5 & 15 gallon capacity
  • Voltage- 110V & 230V
  • Mixer- 110V & 230V for both tank sizes
  • Level Sensor for both tank sizes

DATASHEETS

New CMP Equipment Request Form

Development Lab Process Request Form

Software Request Form

Parts & Services Request Form