Contact For Parts & Services Contact For Parts & Services Contact For Parts & Services Subject* Type*Legacy Tool SupportCapstone Tool SupportAquarius Tool SupportGeneral Service CallParts RequestPMRepair OffsiteRepair OnsiteScheduled Maintenance RequestService RequestDescription*Company* Contact Name* Web Contact Title* Email* Phone*CAPTCHAEmailThis field is for validation purposes and should be left unchanged. NEWS AND EVENTS POSTED ON Tuesday September 24, 2024Axus Technology Delivers Industry’s Lowest Cost of Ownership for CMP Processes on 200mm SiC WafersCustomer Data Confirm Axus Capstone® Platform Delivers 2x Higher Throughput and More than 50% Lower Total Cost per Wafer Compared to Leading CMP Competitor...Read More...