Semiconductors are at the heart of modern technological advancement. However, semiconductor progress comes with significant environmental costs. Energy-intensive processes, the use of hazardous materials, and the vast amounts of water required for manufacturing are just a few of the sustainability challenges facing the industry today. Artificial intelligence (AI) demands and data center consumption involve massive amounts of power, making improved power efficiency a vital aspect of this effort for chip and equipment makers.
As demand for semiconductors continues to surge, so too does the pressure on companies to mitigate their environmental impact. Sustainability has become a top priority for the semiconductor industry – at the core of these efforts is the need to develop more sustainable practices that reduce resource consumption and carbon emissions without compromising on performance or productivity.
From implementing more energy-efficient processes to pioneering eco-friendly materials, the industry is evolving. However, achieving these sustainability goals is far from simple, particularly when it comes to advanced semiconductor manufacturing steps such as chemical mechanical planarization (CMP).
Reducing Footprint
The environmental footprint of semiconductor production is extensive. Fabs require vast amounts of electricity to power advanced equipment. Manufacturing a single chip can consume up to 20 kilowatt-hours (kWh) of energy, not to mention the gallons of ultrapure water (UPW) needed to rinse away contaminants during production. Given the global scale of semiconductor fabrication, it is no surprise that sustainability has become a top priority for manufacturers and their suppliers.
Many semiconductor manufacturers are exploring water recycling and reuse strategies to minimize their overall water consumption, and the industry is increasingly investing in renewable energy sources to lower the environmental impact of production. This shift not only helps reduce greenhouse gas emissions but also aligns with broader sustainability goals. In addition, collaboration among industry stakeholders to establish sustainability standards and best practices is becoming increasingly important. This collective effort can drive significant improvements in environmental performance across the sector.
This is just the start of moving toward greater sustainability. As manufacturing processes must evolve to handle advanced materials like silicon carbide (SiC), gallium nitride (GaN), and other compound semiconductors used in high-power and high-frequency applications. These materials are known for their ability to handle higher voltages and temperatures, which leads to improved power efficiency and reduced operational costs. By minimizing energy wastage, they help data centers operate more sustainably while meeting the high power demands of AI workloads.
Mitigating Power Issues
Energy management is vital, and semiconductor technologies are being leveraged to enhance the energy balance of data centers. Innovations in power management can lead to more efficient energy use, allowing data centers to optimize their operations and reduce overall power consumption
In addition to heightening their adoption of compound semis, companies are developing robust power solutions, such as uninterruptible power supply (UPS) systems, specifically designed for AI data centers. These systems ensure reliable and uninterrupted power, which is crucial for handling compute-intensive tasks. By providing stable power, they help maintain operational efficiency and reduce the risk of downtime.
The integration of AI into semiconductor manufacturing processes can also lead to improved efficiency and reduced defects. AI-driven automation enhances quality control, which can result in higher yields and lower energy consumption during production. This not only helps in manufacturing but also in optimizing the performance of the chips used in data centers.
Ongoing research is focused on limiting the power consumption of graphical processing units (GPUs) and other components used in AI workloads. By developing methods to optimize power usage, manufacturers can significantly reduce the energy footprint of AI applications.
Unique CMP Challenges
CMP is indispensable for achieving the level of topography required in today’s chips, which pack billions of transistors onto a single wafer. However, CMP presents its own sustainability challenges, especially when working with advanced materials like SiC and GaN.
CMP processes are energy-intensive, contributing to the overall power usage of semiconductor manufacturing. The energy consumption associated with CMP, particularly in the context of wide-bandgap (WBG) devices, can be significant due to the longer processing times and more aggressive process conditions. This not only increases operational costs but also contributes to greenhouse gas emissions if the energy is sourced from non-renewable resources.
CMP also consumes large amounts of chemicals, slurry, and water. One of the most pressing challenges is the high consumption of clean water and the use of toxic chemicals. The CMP process requires large volumes of ultrapure water for both the polishing and cleaning steps, which can strain local water resources, especially in regions facing water scarcity. Additionally, the chemicals used in CMP slurries can generate hazardous waste.
Slurries are typically composed of abrasive particles suspended in a liquid, combined with chemical additives that aid in the material removal process. While necessary for the performance of the CMP process, the sheer volume of materials consumed raises sustainability concerns, particularly as semiconductor fabs transition to larger wafer sizes and more advanced materials that are harder to process.
Slurry use necessitates careful management and treatment. The wastewater generated during the CMP process often contains contaminants that require sophisticated treatment methods to ensure they do not harm the environment. For SiC, which is much harder and more brittle than traditional silicon, the CMP process becomes even more resource-intensive.
Improving the efficiency of CMP equipment is crucial for reducing both water and energy consumption. Advances in CMP technology, such as the development of more efficient consumables and process optimizations, can lead to better yields and lower costs of ownership. However, achieving these improvements requires ongoing research and investment.
CMP contamination issues can lead to defects in WBG devices. Effective contamination control is essential to maintain the quality of the wafers and reduce waste generated from defective products. This challenge is compounded by the need for rigorous cleaning processes that also consume significant resources.
Toward More Sustainable CMP
When it comes to addressing the sustainability challenges of CMP, Axus Technology stands at the forefront of innovation. Recognized as a leader in CMP and wafer-thinning technologies, we have built a reputation for delivering modern, flexible equipment designed to meet the needs of today’s semiconductor manufacturers. Our customizable CMP systems can be adapted to a variety of applications, reducing waste and improving efficiency, while maintaining the high level of performance required for advanced semiconductor production.
As a small-scale OEM, we are nimbler and more cost-efficient than our competitors – large OEMs offering legacy 200mm tools – enabling us to bring new products to market in a fraction of the time others require. This agility enables us to support your needs effectively, helping you bring your own solutions to market faster and at lower cost.
Our Capstone® CMP platform was developed with both flexibility and sustainability in mind. Compared to competing tools, Capstone systems offer:
- 2x higher throughput
- 45% smaller footprint
- 60% less electrical energy consumption
- 80% less water consumption
As a true bridge tool – i.e., one that can run two wafer sizes at a time (any combination of 100/150/200mm wafers) – Capstone enables low conversion time between sizes, which translates to extremely efficient, cost-effective processing. In addition, the integrated wafer polisher and cleaner eliminates manual transfer of wafers into the cleaner, further minimizing downtime and defect density.
One of Capstone’s key innovations is its ability to handle advanced materials like SiC and GaN with greater efficiency, significantly reducing polishing times and slurry consumption. This not only lowers the environmental impact of the CMP process but also cuts operational costs for manufacturers. Our tools’ integrated slurry and water recycling capabilities also enable fabs to reuse materials and further reduce waste.
As the semiconductor industry continues to evolve, manufacturers need CMP systems that can be quickly adapted to new materials and processes. Capstone is a modular platform designed to be future-proof, allowing you to upgrade your systems as new materials and technologies emerge. This adaptability not only extends the lifespan of the equipment but also helps reduce the need for new capital investments.
Finally, our commitment to sustainability extends beyond our products. We actively work with you to optimize CMP processes, offering technical support and expertise to help you implement more sustainable practices. This close collaboration ensures that our solutions are not only cutting-edge but also aligned with broader industry sustainability objectives.
Looking Ahead
As semiconductor manufacturing becomes more complex, the need for sustainable practices has never been more pressing. Advanced materials like SiC and GaN hold the key to enabling next-generation technologies, but they also present new challenges for processes like CMP. Addressing these challenges requires innovative approaches to materials, equipment, and resource management.
Axus Technology’s CMP solutions are designed to meet these challenges head-on, offering the flexibility, efficiency, and sustainability that today’s semiconductor manufacturers demand. By reducing material consumption, improving process efficiency, and enabling the use of advanced materials, Axus is helping to pave the way for a more sustainable semiconductor industry.
