Strasbaugh 6DS-SP Production CMP System
The Strasbaugh 6DS-SP CMP System is a robust and reliable CMP platform delivering low-cost, high yield processes for 100mm to 200mm diameter material.
STANDARD FEATURES INCLUDE:
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Membrane wafer carriers for improved process performance
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Dual polishing platens for one or two-step processes
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Dual polishing spindles for 100-200mm wafers and higher throughput
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Proven process performance for dielectrics, metals, poly, and STI
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Pad conditioning system provides in-situ programmable selective pad conditioning with 20 zones of programmable control
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Four cassette elevators, with robotic load/unload system
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Hydrolift load station provides better reliability and improved cleanliness
OPTIONAL FEATURES:
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Various styles of multi-zone membrane wafer carriers for improved uniformity and edge control performance
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End Point Determination (EPD) system
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Wafer size conversion kits
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Slurry blending and distribution system
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Temperature control of primary polishing platen
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Secondary platen pad conditioning system
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Vacuum system with automatic fluid separation unit
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Curtain rinse between polishing platens to reduce slurry cross-contamination
DATASHEETS
Contact for
Equipment
Development Lab
Process Request Form
Contact for
Parts & ServiceS
NEWS AND EVENTS
Axus/Plessey Partnership
Axus partners with Plessey Semiconductors to help bring high-performance GaN-on-Silicon monolithic microLED technology to the mass market.
Using tooling from Axus and optimised processes, Plessey Semiconductors has achieved a successful wafer to wafer bond of a 1080p microLED display 0.26” diagonal to a 3-micron pixel-pitch backplane. Much smaller than the 0.7" diagonal 8-micron pixel-pitch active-matrix display previously demonstrated.
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