Strasbaugh 6EC CMP System

Strasbaugh 6EC CMP System is an economical tool for CMP research, failure analysis, and low-volume production. Its semi-automatic operations are programmable through a color, touch-screen GUI for repeatable and accurate process control. The Model 6EC is the affordable solution, providing the benefits of state-of-the-art CMP at a low cost.

Standard Features Include:  Strasbaugh6EC web

  • Closed-loop table and spindle RPM motors help ensure consistent process results. 
  • Programmable pad conditioning increases the lifetime of the pad and improves WIWNU. 
  • Minimal maintenance lowers the cost of ownership. 
  • Small footprint offers convenience for small labs. 
  • Pad conditioning system provides in-situ and/or ex-situ programmable selective pad conditioning for consistent removal rates and minimum non-uniformity. 
  • 20 zones of Programmable control: dwell time, down force and RPM can be programmed for each zone. Pad conditioning can be done with a diamond plated disk or nylon brush. 

Options:

  • ViPRR carriers reduce edge exclusion, control center-to-edge  uniformity, and improve overall performance and reliability.