POLI-1300PCB Planarization Tool

The G & P Technology POLI-1300PCB planarization tool is specifically designed for use in processing large format multilayer panels.  The G&PPOLI 1300 PCB POLI-1300PCB uses a large format carrier designed for use with rectangular substrates up to 530mm on a side. The rigid design of both the direct drive carrier and tool, coupled with efficient through-the-table slurry delivery, provides for efficient planarization with exceptional process uniformity and substrate-to-substrate repeatability. Using process hardware similar to that used in semiconductor CMP processing, the carrier assembly with the substrate backing film, is easy to load and securely holds the substrate in place for polishing.

Platen Assembly

  • High load capacity with low deflection (Large Diameter Thrust Bearing)

  • Heavy duty motor

  • High-flatness 

  • Constant temperature control (Cooling channel embedded)

  • Slurry transport holes located center of the platen

Lg format carrier

Tool Specifications
Polishing Platen Diameter 1300 mm (51.2”)
Polishing Platen Construction

Anodized Aluminum - temperature control by circulating water

Temperature Control unit is available as an option

Polishing process, part transfer, loading system

Manually load/unload

Automatic polishing process step-by-step sequencing

Dry in – Wet out process

Polishing Cycle Control PLC Program and Touch Screen interface
Part Carrier Head 930 mm (36.6”) diameter
Down Force Application Friction-free pneumatic system
Down Force Range Up to 1300 kgf - Up to approx. 7 psi on a 510 x 510 mm part
Part Carrier Construction Stainless Steel
Part size range

Round:  915 mm max diameter (36”)

Capable of polishing the typical squared PCB parts up to 510mm x 510mm

Part carrier speed range 30 to 100 rpm rotational motion
Pad Conditioner Swing Arm Nylon Brush Conditioner
Polishing Platen Motor 22 kW (30 HP)
Carrier Head Motor 3.7 kW (5 HP)
Oscillation Motor 3.7 kW (5 HP)
Oscillation Distance ± 15˚

 

Dimensions
Metric (mm) 2600W x 2700D x 2500H
Inches 102.36W x 106.3D x 98.42H
Weight 4000 kg 8800 lbs