OnTrak DSS-200 Series 2 Post CMP Cleaner
OnTrak DSS 200 Series 2 Double-sided PVA Scrubber offers production-proven cleaning results for particles as small as 0.125µm. Depending on the application, throughputs of 45-65 wafers per hour are attainable, making the DSS-200 Series 2 the most cost-effective wafer cleaning system for wafers from 150mm to 200mm.
Standard Features Include: 
- 200mm ergonomic load station
- Double sided PVA scrub
- Dual brush boxes
- Ammonia dispense
- IR assisted spin dry station
- Robotic unload
- Vertical unload station
- Touchscreen controls
Optional Features:
- Megasonics at spin dry station
- Multiple chemical delivery system
- Signal light tower