Axus Technology Delivers CMP and Wafer Thinning Tools to the METU-MEMS/Nanofabrication Center in Ankara Turkey

Chandler, AZ May 6th, 2010 – Axus Technology has announced that the Middle East Technical University (METU) in Ankara, Turkey has installed a suite of advanced CMP and surface processing equipment purchased from Axus. The installation includes CMP and wafer thinning capability for 4 inch, 150mm, and 200mm substrates, supporting a wide range of semiconductor and alternate substrate processes. 

As one of the premier technological research and education institutions in Turkey, the METU-MEMS/Nanofabrication Center has been aggressively expanding the range of technologies within its design and fabrication center. This tool set is one of several strategic technology additions undertaken by the METU-MEMS/Nanofabrication Research and Applications Center as part of their overall growth initiative.

"The tools delivered by Axus Technology will allow us to apply CMP, substrate thinning, and cleaning technologies to the various substrates and processes that our development projects require. Axus Technology was the single supplier that could deliver the process capability and support resources that we required," stated Prof. Tayfun Akin, Director of the METU-MEMS/Nanofabrication Research and Applications Center. "The Axus Technology team was recommended by several facilities, and worked with us to configure and install the flexible tool set that we needed," added Prof. Akin. "With the addition of the Axus tool set to the process equipment previously installed, the METU-MEMS/Nanofabrication Center now has a full range of MEMS/Nanofabrication process capabilities, making it possible for our researchers to broaden their research and enabling ever greater collaboration with our peer institutes worldwide. Continued technological additions are important to our mission of supporting leading edge research and the educational results at METU." 

"We are delighted to be chosen to supply the suite of equipment at the METU-MEMS/Nanofabrication Center," stated Barrie VanDevender, VP of Sales and Marketing at Axus. "The breadth of process capability needed within METU created another opportunity for our engineering team to develop the process and hardware kits required by METU researchers. The METU-MEMS/Nanofabrication Center has installed an impressive technological base with a highly motivated group of researchers and engineers. We are proud to be selected to support their work."